Determination of morphology and size distribution of primary and secondary abrasives of slurry is essential for optimization of CMP performance. The undiluted slurry was characterized in liquid phase using silicon based Nano-pipettes in TEM. To validate utility of Nano-pipettes, comparatively quantitative analysis was performed by cryo-TEM technique.
Date:
2013-07
Relation:
20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. 2013 Jul:400-403.
