國家衛生研究院 NHRI:Item 3990099045/7580
English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 12145/12927 (94%)
造访人次 : 855204      在线人数 : 1010
RC Version 6.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜寻范围 查询小技巧：
  • 您可在西文检索词汇前后加上"双引号"，以获取较精准的检索结果
  • 若欲以作者姓名搜寻，建议至进阶搜寻限定作者字段，可获得较完整数据
    •  进阶搜寻
    主页 ‧ 登入 ‧ 上传 ‧ 说明 ‧ 关于NHRI ‧ 管理 到手机版


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.nhri.org.tw/handle/3990099045/7580


    题名: Application of TEM for distinguishing the primary and secondary abrasives of undiluted CMP slurry
    作者: Sun, CJ;Tai, LA;Sharma, P;Ko, YF;Chen, YC;Chu, CH;Hsieh, YF;Yang, CS;Yew, TR
    贡献者: Center for Nanomedicine Research
    摘要: Determination of morphology and size distribution of primary and secondary abrasives of slurry is essential for optimization of CMP performance. The undiluted slurry was characterized in liquid phase using silicon based Nano-pipettes in TEM. To validate utility of Nano-pipettes, comparatively quantitative analysis was performed by cryo-TEM technique.
    日期: 2013-07
    關聯: 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. 2013 Jul:400-403.
    Link to: http://dx.doi.org/10.1109/ipfa.2013.6599189
    Cited Times(WOS): https://www.webofscience.com/wos/woscc/full-record/WOS:000329045700073
    Cited Times(Scopus): http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84885625665
    显示于类别:[楊重熙] 會議論文/會議摘要

    文件中的档案:

    档案 描述 大小格式浏览次数
    SCP84885625665.pdf634KbAdobe PDF185检视/开启


    在NHRI中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回馈