國家衛生研究院 NHRI:Item 3990099045/11308

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Please use this identifier to cite or link to this item: http://ir.nhri.org.tw/handle/3990099045/11308

Title:	Exposure assessment of process by-product nanoparticles released during the preventive maintenance of semiconductor fabrication facilities
Authors:	Liao, BX;Tseng, NC;Li, Z;Liu, Y;Chen, JK;Tsai, CJ
Contributors:	Institute of Biomedical Engineering and Nanomedicine
Abstract:	This study characterized the process by-product particles (mostly nanoparticles) released during the preventive maintenance of semiconductor fabrication facilities, such as chemical mechanical planarization (CMP), plasma-enhanced chemical vapor deposition (PECVD), and ion implantation. Manual sampling and real-time measurements with direct reading instruments were conducted to assess the exposure levels of nanoparticles and their physical and chemical properties. Significant amount of nanoparticles were observed in the breathing zone of the workers during the maintenance of the PECVD and ion implanters with the peak number concentrations as high as 6,470,000 and 65,444 #/cm3, respectively, indicating that the deposited residual chemicals in the reaction chambers were released as airborne nanoparticles by the maintenance activities. In contrast, nanoparticles released during the maintenance of the local scrubber, CMP, and replacing CMP slurry drums were insignificant. Causes of the particle release were discussed and suggestions were made to mitigate the nanoparticle release and reduce the exposure levels.
Date:	2018-07
Relation:	Journal of Nanoparticle Research. 2018 Jul;20(7):Article number 203.
Link to:	http://dx.doi.org/10.1007/s11051-018-4302-7
JIF/Ranking 2023:	http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=NHRI&SrcApp=NHRI_IR&KeyISSN=1388-0764&DestApp=IC2JCR
Cited Times(WOS):	https://www.webofscience.com/wos/woscc/full-record/WOS:000439529000004
Cited Times(Scopus):	https://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85050372704
Appears in Collections:	[Jen-Kun Chen] Periodical Articles

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